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Courtesy of Caltech Information Science and Technology Initiative – Wierman Cray 2 Supercomputer

Grants List


Courtesy of Dave Caron

Massachusetts Institute of Technology, Department of Physics

Electron Beam Lithography System

To provide support for the acquisition of a next generation electron beam lithography system to enable unique research and advances in electronics, photonics, physics, chemistry, materials science, bioengineering, and nano-electromechanical systems. The electron beam lithography system will enable premier research for national, regional, and local users from universities, industry, and U.S. national laboratories.

Title: Electron Beam Lithography System
Date Awarded: Aug 2011
Amount: $500,000
Term: 14 months
Grant ID: GBMF2932
Funding Area: Science, Special Projects in Science